Microwave filters based on LTCC technology
Along with traditional LC filters, ONIIP carries out designing and provides delivery of 3-D integral filters on LTCC-ceramics. Integral filters of HF and SHF range executed on LTCC-technology, which are applied in input circuits and in IF stages of communication devices, location devices and control devices. Integral filters on LTCC-technology are characterized by low mass and size and reliability by means of integration of concentrated, quasi-concentrated and distributed elements of filters in ceramic board. LC filters - frequency range 10 kHz…1500 MHz - fractional bandwidth 10…200 % - stopband attenuation 30…60 dB - insertion attenuation in pass band (max.2 dB) - VSWR (max.1.5) Integral filters on LTCC technology: - frequency range 80 MHz…3000 MHz - relative pass band 10…70 % - stopband attenuation 20…40 dB insertion loss in bandwidth 2…4 dB SHF resonator construction: - SMR structure; - operating frequency range 2 – 10 GHz; - Q-factor – 90 - 110; - counter electrode dimensions 10-2 – 10-1 mm; - dimensions - ~ 1õ1 mm SHF resonator technology manufacture - electroacoustic converter - piezoelectric film with lower (Mo) and higher electrodes (Àl), - piezoelectric film thickness - λ/2, method of manufacture: - magnetron deposition in vacuum, - selective photolithography; – Bragg reflector: – molybdenum and aluminium films – film thickness λ/4, – method of manufacture – magnetron deposition in vacuum, – technology peculiarity: - metallic and piezoelectric films deposition possibility in united technological cycle on insulating base, - sputtered layers quantity (up to 15 films), - insulating bases – glassceramic, fused quartz, oxidized silicon etc. SHF resonator characteristics: - measurable parameter - S11; - measuring probe - G-S-G 40 GHz Service in SHF resonator manufacture: - vacuum assembly updating under magnetron and reactive magnetron deposition of metallic and piezoelectric films; - selective photolithography of counter electrode Practical realization - thin-film SHF resonators and strip SHF filters for wireless systems; - sales volume of foreign SMR devices in 2012 – 2 000000 000 USD |
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